Low-Temperature Wet Conformal Nickel Silicide Deposition for Transistor Technology through an Organometallic Approach

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Author(s) Lin, Tsung-Han, Margossian, Tigran, Marchi, Michele de, Thammasack, Maxime, Zemlyanov, Dmitry, Kumar, Sudhir, Jagielski, Jakub, Zheng, Li-Qing, Shih, Chih-Jen, Zenobi, Renato, Micheli, Giovanni de, Baudouin, David, Gaillardon, Pierre-Emmanuel, Copéret, Christophe
Publication Type Journal Items, Publication Status: Published
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Title Low-Temperature Wet Conformal Nickel Silicide Deposition for Transistor Technology through an Organometallic Approach
Author(s) Lin, Tsung-Han
Margossian, Tigran
Marchi, Michele de
Thammasack, Maxime
Zemlyanov, Dmitry
Kumar, Sudhir
Jagielski, Jakub
Zheng, Li-Qing
Shih, Chih-Jen
Zenobi, Renato
Micheli, Giovanni de
Baudouin, David
Gaillardon, Pierre-Emmanuel
Copéret, Christophe
Journal or Series Title ACS Applied Materials and Interfaces
Volume Number 9
Issue Number 5
Start Page 4948
End Page 4955
ISSN 1944-8244
1944-8252
Publisher American Chemical Society
Publication Place Washington, DC
Publication Date 2017-02
Keyword(s) Nanoparticle
Nickel silicide
One-pot synthesis
Organometallic approach
Semiconductor
Surface investigation
DOI 10.1021/acsami.6b13852
Additional Notes Published online 12 January 2017
Document Type Article
Publication Status Published
Language English
NEBIS System Number 010850136
Source Database ID SCOPUS-85011955243
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@article{Ln2017,
  author = "Lin, Tsung-Han and Margossian, Tigran and Marchi, Michele de and Thammasack, Maxime and Zemlyanov, Dmitry and Kumar, Sudhir and Jagielski, Jakub and Zheng, Li-Qing and Shih, Chih-Jen and Zenobi, Renato and Micheli, Giovanni de and Baudouin, David and Gaillardon, Pierre-Emmanuel and Cop{\'{e}}ret, Christophe",
  title = "{L}ow-{T}emperature {W}et {C}onformal {N}ickel {S}ilicide {D}eposition for {T}ransistor {T}echnology through an {O}rganometallic {A}pproach",
  journal = "ACS Applied Materials and Interfaces",
  year = 2017,
  volume = "9",
  number = "5",
  pages = "4948--4955",
  month = feb,
}


E-Citations record created: Wed, 01 Mar 2017, 11:25:55 CET